Fabrication, modeling and testing of a thin film Au/Ti microheater

A thin film gold/titanium (Au/Ti) microheater is developed for microthruster ignition, micro explosive boiling, and micro sensor applications. The microheater was fabricated onto a Pyrex bulk substrate using a micro-fabrication technology. A finite-element based electro-thermal modeling was employed...

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Bibliographic Details
Published in:International journal of thermal sciences 2007-06, Vol.46 (6), p.580-588
Main Authors: Zhang, K.L., Chou, S.K., Ang, S.S.
Format: Article
Language:English
Subjects:
Applied sciences
Au/Ti
Electronics
Exact sciences and technology
Experiment
Microelectronic fabrication (materials and surfaces technology)
Microheater
Modeling
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Thin film
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Summary:A thin film gold/titanium (Au/Ti) microheater is developed for microthruster ignition, micro explosive boiling, and micro sensor applications. The microheater was fabricated onto a Pyrex bulk substrate using a micro-fabrication technology. A finite-element based electro-thermal modeling was employed to predict the microheater performance. The variations of the microheater temperature with time, space, and power supply are determined from the modeling. A method is presented to determine the thin film Au/Ti electrical resistivity and thermal conductivity. It was found that significant differences exist between heat transfer in microheater and conventional heater. Experimental testing of the microheater temperature was performed using a customized circuitry. The finite-element model is validated by the experimental measurements.
ISSN:1290-0729
1778-4166
DOI:10.1016/j.ijthermalsci.2006.08.002