Gas sensing properties of undoped and antimony doped tin oxide films prepared by spray pyrolysis and electron beam evaporation method

The thin films of undoped and antimony doped tin oxide films were prepared on glass substrates by spray pyrolysis and electron beam evaporation techniques. The substrate temperature was varied between 300 and 370 deg C in case of spray pyrolysis and 200 deg C in case of electron beam evaporation. Th...

Full description

Saved in:
Bibliographic Details
Published in:Indian journal of pure & applied physics 2006-11, Vol.44 (11), p.867-870
Main Authors: Shamala, K S, Murthy, L C S, Rao, K Narasimha
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The thin films of undoped and antimony doped tin oxide films were prepared on glass substrates by spray pyrolysis and electron beam evaporation techniques. The substrate temperature was varied between 300 and 370 deg C in case of spray pyrolysis and 200 deg C in case of electron beam evaporation. The films were tested as gas sensors in the presence of liquid petroleum gas (LPG) and compressed natural gas (CNG). Undoped and antimony doped tin oxide films prepared by spray pyrolysis were more sensitive to LPG. Sensitivity of spray deposited ATO film in the presence of 1000 PPM of LPG was found to be 0.86 at an operating temperature of 400 deg C and it was 0.23 for undoped film. Undoped tin oxide films prepared by electron beam evaporation showed a maximum sensitivity of 0.79 at an operating temperature of 375 deg C on its exposure to 1000 PPM of LPG. The performance of the sensor has been explained on the basis of the structure and conduction mechanism of the tin oxide film.
ISSN:0019-5596