Diamond components with integrated abrasion sensor for tribological applications

• Published in: Diamond and related materials 2007-04, Vol.16 (4), p.991-995
• Main Authors: Pernice, Wolfram, Obloh, Harald, Müller-Sebert, Wolfgang, Wild, Christoph, Koidl, Peter, Urban, Gerald
• Format: Article
• Language: English
• Subjects: Boron-doped CVD diamond; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Materials science; Mechanical and acoustical properties; Methods of deposition of films and coatings; film growth and epitaxy; Physical properties of thin films, nonelectronic; Physics; Sensors; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Specific materials; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thread guiding
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2006.11.034

Tribological components made from CVD diamond are commonly used for protection against abrasion in rough environments. Such components can be used e.g. in textile industry as thread guiding devices provided that surface roughness and resultant friction are low. In this work we report on the fabrication of CVD diamond components of non-planar shape. These devices were fabricated in a negative replication approach on mechanically structured substrates. Using this technique cylindrically shaped diamond devices with smooth surfaces were produced by using the nucleation side of the diamond layers as the exposed surface, thus making subsequent polishing steps unnecessary. Applying an improved two-step nucleation method further reduced surface roughness. Sensing elements in the form of resistors made from boron-doped CVD diamond were integrated into the device surface. Device performance was characterized with respect to the temperature dependence of the resistors and the suitability as abrasion sensor.