Liquid Phase Deposition Of Thin Titanium Dioxide Films For NH3 Detection

TiO2 thin films are prepared by a new method called Liquid Phase Deposition (LDP). The layers are obtained by the reaction between the metal fluorocomplex and boric acid in aqueous solution. The morphology of the films and the composition are investigated by scanning electron microscopy (SEM) and x-...

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Bibliographic Details
Main Authors: Georgieva, V, Stefchev, P, Stefanov, P, Spassov, L, Raicheva, Z, Ivanova, K
Format: Conference Proceeding
Language:English
Online Access:Get full text
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Summary:TiO2 thin films are prepared by a new method called Liquid Phase Deposition (LDP). The layers are obtained by the reaction between the metal fluorocomplex and boric acid in aqueous solution. The morphology of the films and the composition are investigated by scanning electron microscopy (SEM) and x-ray photoelectron spectrometry (XPS). The sorption properties of TiO2 film to NH3 are measured by the Quartz Crystal Microbalance (QCM) method. A correlation between NH3 concentration and the sorption ability of as-deposited and annealed samples is obtained.
ISSN:0094-243X
DOI:10.1063/1.2733473