Fabrication of microchannel containing nanopillar arrays using micromachined AAO (anodic aluminum oxide) mold

In this paper, we present a novel low cost fabrication method of a microchannel containing nanopillar arrays based on the soft lithographical replication of PDMS (polydimethylsiloxane) using a micromachined AAO (anodic aluminum oxide) master mold without any photolithographic processes. The micromac...

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Bibliographic Details
Published in:Microelectronic engineering 2007-05, Vol.84 (5), p.1532-1535
Main Authors: Kim, Dong Sung, Lee, Han Ul, Kim, Nam Hyo, Lee, Kun-Hong, Cho, Dong-Woo, Kwon, Tai Hun
Format: Article
Language:English
Subjects:
Anodic aluminum oxide (AAO)
Applied sciences
Electronics
Electropolishing
Exact sciences and technology
Micro-end-milling
Microchannel
Microelectronic fabrication (materials and surfaces technology)
Nanopillar array
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:In this paper, we present a novel low cost fabrication method of a microchannel containing nanopillar arrays based on the soft lithographical replication of PDMS (polydimethylsiloxane) using a micromachined AAO (anodic aluminum oxide) master mold without any photolithographic processes. The micromachined AAO master mold was fabricated by combining the two-step anodization, micro-end-milling and the subsequent electropolishing processes, thereby having a nanoporous alumina layer on top of the micro-end-milled microchannel positive relief. Large numbers of the same microchannel with nanopillar arrays were finally realized by the PDMS replica molding from the micromachined AAO mold. The microchannel with nanopillar arrays fabricated in this study could be applied to various integrated biological, chemical or optical devices.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2007.01.166