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Monitoring plasma nitridation of HfSiOx by corona charge measurements

In this work we present an evaluation and understanding of corona charge measurements on decoupled plasma nitrided (DPN) HfSiOx. Typical corona charge parameters such as equivalent oxide thickness (EOT), density of interface states (Dit) and saturated surface voltage (Vsat) are evaluated. It is show...

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Published in:Microelectronic engineering 2007-09, Vol.84 (9-10), p.2251-2254
Main Authors: EVERAERT, J.-L, SHI, X, ROTHSCHILD, A, SCHAEKERS, M, ROSSEEL, E, PAVELKA, T, DON, E, VANHAELEMEERSCH, S
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cited_by cdi_FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53
cites cdi_FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53
container_end_page 2254
container_issue 9-10
container_start_page 2251
container_title Microelectronic engineering
container_volume 84
creator EVERAERT, J.-L
SHI, X
ROTHSCHILD, A
SCHAEKERS, M
ROSSEEL, E
PAVELKA, T
DON, E
VANHAELEMEERSCH, S
description In this work we present an evaluation and understanding of corona charge measurements on decoupled plasma nitrided (DPN) HfSiOx. Typical corona charge parameters such as equivalent oxide thickness (EOT), density of interface states (Dit) and saturated surface voltage (Vsat) are evaluated. It is shown that especially Dit and Vsat are promising parameters for nitiridation monitoring as they show correlation to DPN parameters within good accuracy. Fundamental explanation is given for the observed behaviour of Vsat by use of a direct tunneling model.
doi_str_mv 10.1016/j.mee.2007.04.017
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_29855736</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>29855736</sourcerecordid><originalsourceid>FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53</originalsourceid><addsrcrecordid>eNpFkE1LAzEYhIMoWKs_wFsuets1H5vd7FFKtUKlB_Uc0uRNTdnd1GQL9t-b0oKnYWBmGB6E7ikpKaH107bsAUpGSFOSqiS0uUATKhteCFHLSzTJmaZoOW2u0U1KW5J9ReQEzd_D4McQ_bDBu06nXuPso7d69GHAweGF-_CrX7w-YBNiGDQ23zpuAPeg0z5CD8OYbtGV012Cu7NO0dfL_HO2KJar17fZ87IwnNRj4VpuWE2tYRostwyINFQ3rDJuTYgllrdtLUC3xDAHzAqRD-efmktnaxB8ih5Pu7sYfvaQRtX7ZKDr9ABhnxRrpRANr3OQnoImhpQiOLWLvtfxoChRR2BqqzIwdQSmSKUysNx5OI_rZHTnoh6MT_9FKQUXouJ_1a9szw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29855736</pqid></control><display><type>article</type><title>Monitoring plasma nitridation of HfSiOx by corona charge measurements</title><source>Elsevier:Jisc Collections:Elsevier Read and Publish Agreement 2022-2024:Freedom Collection (Reading list)</source><creator>EVERAERT, J.-L ; SHI, X ; ROTHSCHILD, A ; SCHAEKERS, M ; ROSSEEL, E ; PAVELKA, T ; DON, E ; VANHAELEMEERSCH, S</creator><creatorcontrib>EVERAERT, J.-L ; SHI, X ; ROTHSCHILD, A ; SCHAEKERS, M ; ROSSEEL, E ; PAVELKA, T ; DON, E ; VANHAELEMEERSCH, S</creatorcontrib><description>In this work we present an evaluation and understanding of corona charge measurements on decoupled plasma nitrided (DPN) HfSiOx. Typical corona charge parameters such as equivalent oxide thickness (EOT), density of interface states (Dit) and saturated surface voltage (Vsat) are evaluated. It is shown that especially Dit and Vsat are promising parameters for nitiridation monitoring as they show correlation to DPN parameters within good accuracy. Fundamental explanation is given for the observed behaviour of Vsat by use of a direct tunneling model.</description><identifier>ISSN: 0167-9317</identifier><identifier>EISSN: 1873-5568</identifier><identifier>DOI: 10.1016/j.mee.2007.04.017</identifier><identifier>CODEN: MIENEF</identifier><language>eng</language><publisher>Amsterdam: Elsevier Science</publisher><subject>Applied sciences ; Electronics ; Exact sciences and technology ; Materials</subject><ispartof>Microelectronic engineering, 2007-09, Vol.84 (9-10), p.2251-2254</ispartof><rights>2007 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53</citedby><cites>FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>309,310,314,780,784,789,790,23930,23931,25140,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=18853554$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>EVERAERT, J.-L</creatorcontrib><creatorcontrib>SHI, X</creatorcontrib><creatorcontrib>ROTHSCHILD, A</creatorcontrib><creatorcontrib>SCHAEKERS, M</creatorcontrib><creatorcontrib>ROSSEEL, E</creatorcontrib><creatorcontrib>PAVELKA, T</creatorcontrib><creatorcontrib>DON, E</creatorcontrib><creatorcontrib>VANHAELEMEERSCH, S</creatorcontrib><title>Monitoring plasma nitridation of HfSiOx by corona charge measurements</title><title>Microelectronic engineering</title><description>In this work we present an evaluation and understanding of corona charge measurements on decoupled plasma nitrided (DPN) HfSiOx. Typical corona charge parameters such as equivalent oxide thickness (EOT), density of interface states (Dit) and saturated surface voltage (Vsat) are evaluated. It is shown that especially Dit and Vsat are promising parameters for nitiridation monitoring as they show correlation to DPN parameters within good accuracy. Fundamental explanation is given for the observed behaviour of Vsat by use of a direct tunneling model.</description><subject>Applied sciences</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Materials</subject><issn>0167-9317</issn><issn>1873-5568</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNpFkE1LAzEYhIMoWKs_wFsuets1H5vd7FFKtUKlB_Uc0uRNTdnd1GQL9t-b0oKnYWBmGB6E7ikpKaH107bsAUpGSFOSqiS0uUATKhteCFHLSzTJmaZoOW2u0U1KW5J9ReQEzd_D4McQ_bDBu06nXuPso7d69GHAweGF-_CrX7w-YBNiGDQ23zpuAPeg0z5CD8OYbtGV012Cu7NO0dfL_HO2KJar17fZ87IwnNRj4VpuWE2tYRostwyINFQ3rDJuTYgllrdtLUC3xDAHzAqRD-efmktnaxB8ih5Pu7sYfvaQRtX7ZKDr9ABhnxRrpRANr3OQnoImhpQiOLWLvtfxoChRR2BqqzIwdQSmSKUysNx5OI_rZHTnoh6MT_9FKQUXouJ_1a9szw</recordid><startdate>20070901</startdate><enddate>20070901</enddate><creator>EVERAERT, J.-L</creator><creator>SHI, X</creator><creator>ROTHSCHILD, A</creator><creator>SCHAEKERS, M</creator><creator>ROSSEEL, E</creator><creator>PAVELKA, T</creator><creator>DON, E</creator><creator>VANHAELEMEERSCH, S</creator><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20070901</creationdate><title>Monitoring plasma nitridation of HfSiOx by corona charge measurements</title><author>EVERAERT, J.-L ; SHI, X ; ROTHSCHILD, A ; SCHAEKERS, M ; ROSSEEL, E ; PAVELKA, T ; DON, E ; VANHAELEMEERSCH, S</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Applied sciences</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Materials</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>EVERAERT, J.-L</creatorcontrib><creatorcontrib>SHI, X</creatorcontrib><creatorcontrib>ROTHSCHILD, A</creatorcontrib><creatorcontrib>SCHAEKERS, M</creatorcontrib><creatorcontrib>ROSSEEL, E</creatorcontrib><creatorcontrib>PAVELKA, T</creatorcontrib><creatorcontrib>DON, E</creatorcontrib><creatorcontrib>VANHAELEMEERSCH, S</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Microelectronic engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>EVERAERT, J.-L</au><au>SHI, X</au><au>ROTHSCHILD, A</au><au>SCHAEKERS, M</au><au>ROSSEEL, E</au><au>PAVELKA, T</au><au>DON, E</au><au>VANHAELEMEERSCH, S</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Monitoring plasma nitridation of HfSiOx by corona charge measurements</atitle><jtitle>Microelectronic engineering</jtitle><date>2007-09-01</date><risdate>2007</risdate><volume>84</volume><issue>9-10</issue><spage>2251</spage><epage>2254</epage><pages>2251-2254</pages><issn>0167-9317</issn><eissn>1873-5568</eissn><coden>MIENEF</coden><abstract>In this work we present an evaluation and understanding of corona charge measurements on decoupled plasma nitrided (DPN) HfSiOx. Typical corona charge parameters such as equivalent oxide thickness (EOT), density of interface states (Dit) and saturated surface voltage (Vsat) are evaluated. It is shown that especially Dit and Vsat are promising parameters for nitiridation monitoring as they show correlation to DPN parameters within good accuracy. Fundamental explanation is given for the observed behaviour of Vsat by use of a direct tunneling model.</abstract><cop>Amsterdam</cop><pub>Elsevier Science</pub><doi>10.1016/j.mee.2007.04.017</doi><tpages>4</tpages></addata></record>
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subjects Applied sciences
Electronics
Exact sciences and technology
Materials
title Monitoring plasma nitridation of HfSiOx by corona charge measurements
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T02%3A44%3A19IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Monitoring%20plasma%20nitridation%20of%20HfSiOx%20by%20corona%20charge%20measurements&rft.jtitle=Microelectronic%20engineering&rft.au=EVERAERT,%20J.-L&rft.date=2007-09-01&rft.volume=84&rft.issue=9-10&rft.spage=2251&rft.epage=2254&rft.pages=2251-2254&rft.issn=0167-9317&rft.eissn=1873-5568&rft.coden=MIENEF&rft_id=info:doi/10.1016/j.mee.2007.04.017&rft_dat=%3Cproquest_cross%3E29855736%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c306t-f93c261dc2aed3d2e08c1a724cfb00d0d39965ea90c2fe2d55317640a38fd6e53%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=29855736&rft_id=info:pmid/&rfr_iscdi=true