OPTICAL PROPERTIES OF DIAMOND-LIKE CARBON AND NANOCRYSTALLINE DIAMOND FILMS

Thin diamond-like carbon (DLC) coatings deposited by DC or RF magnetron sputtering of a graphite target in argon/methane ambients, and nanocrystalline diamond/amorphous carbon (NCD/a-C) films prepared by microwave plasma chemical vapour deposition (MWCVD) from methane/nitrogen mixtures were investig...

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Bibliographic Details
Published in:Journal of Optoelectronics and Advanced Materials 2005-06, Vol.7 (3), p.1407-1413
Main Authors: Mednikarov, B, Spasov, G, Babeva, Tz, Pirov, J, Sahatchieva, M, Popov, C, Kulisch, W
Format: Article
Language:English
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Summary:Thin diamond-like carbon (DLC) coatings deposited by DC or RF magnetron sputtering of a graphite target in argon/methane ambients, and nanocrystalline diamond/amorphous carbon (NCD/a-C) films prepared by microwave plasma chemical vapour deposition (MWCVD) from methane/nitrogen mixtures were investigated with respect to their basic and optical properties. The influence of the process parameters on the growth rate, morphology, topography and chemical bonding structure of the films was studied and correlated with the results concerning the transmittance, reflectance, refractive index and extinction coefficient of the layers.
ISSN:1454-4164