Optical properties of amorphous carbon nitride films with high nitrogen content

We were successful in preparing amorphous carbon nitride films with high nitrogen content with an N/C ratio of up to 1.07 using reactive magnetron sputtering. The energy gap increases up to 3.1 eV with the increase of N/C ratio. With the increase of the N/C ratio, the Urbach tail energy on the optic...

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Bibliographic Details
Published in:Diamond and related materials 2007-04, Vol.16 (4), p.1340-1342
Main Authors: Habuchi, H., Koketsu, H., Katsuno, T.
Format: Article
Language:English
Subjects:
Amorphous
Carbon nitride
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Fullerenes and related materials
diamonds, graphite
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical properties
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
Specific materials
Sputtering
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Summary:We were successful in preparing amorphous carbon nitride films with high nitrogen content with an N/C ratio of up to 1.07 using reactive magnetron sputtering. The energy gap increases up to 3.1 eV with the increase of N/C ratio. With the increase of the N/C ratio, the Urbach tail energy on the optical absorption spectrum decreases below N/C ratio ∼ 0.5, while it increases above N/C ratio ∼ 0.5. The optical absorption below 1.6 eV appears to be due to surface defects related to nitrogen.
ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2007.01.028