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EPR study of defects in as-received, γ-irradiated and annealed monoclinic HfO2 powder
Electron paramagnetic resonance reveals the presence of several paramagnetic centres in monoclinic HfO2 powders. Three labeled H1, H2, H3 have g//=1.940+/-0.003, g=1.970 +/- 0.001 for H1, gxx=2.003+/-0.003, gyy=2.000+/-0.003 and gzz=1.994+/-0.001 for H2 and gxx=2.014+/-0.002, gyy=2.013+/-0.003 and g...
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Published in: | Microelectronic engineering 2007-09, Vol.84 (9-10), p.2378-2381 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Electron paramagnetic resonance reveals the presence of several paramagnetic centres in monoclinic HfO2 powders. Three labeled H1, H2, H3 have g//=1.940+/-0.003, g=1.970 +/- 0.001 for H1, gxx=2.003+/-0.003, gyy=2.000+/-0.003 and gzz=1.994+/-0.001 for H2 and gxx=2.014+/-0.002, gyy=2.013+/-0.003 and gzz=2.006+/-0.002 for H3. Irradiation with gamma rays causes the population of H2 and H3 to initially rise and then level off; H1 is unaffected by irradiation. H2 and H3 begin to anneal out at or below 100 deg C in air whereas the population of H1 increases at about 400 deg C. Models are suggested for these centres. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2007.04.007 |