The interference of humidity on a shear horizontal surface acoustic wave ammonia sensor

The interference of humidity on an ammonia sensor was studied in this work. The shear horizontal surface acoustic wave (SH-SAW) device coated with l-glutamic acid hydrochloride was fabricated and used as an ammonia sensor. The sensitivity of the SH-SAW ammonia sensor was 4.6 ppm/ppm and the mass loa...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2007-03, Vol.122 (2), p.457-460
Main Authors: Shen, Chi-Yen, Hsu, Cheng-Liang, Hwang, Rey-Chue, Jeng, Jin-Shing
Format: Article
Language:English
Subjects:
Ammonia
Cross-sensitivity
Horizontal
Humidity
Interference
l-Glutamic acid hydrochloride
Perturbation methods
Sensors
Shear
Shear horizontal surface acoustic wave
Surface acoustic waves
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Summary:The interference of humidity on an ammonia sensor was studied in this work. The shear horizontal surface acoustic wave (SH-SAW) device coated with l-glutamic acid hydrochloride was fabricated and used as an ammonia sensor. The sensitivity of the SH-SAW ammonia sensor was 4.6 ppm/ppm and the mass loading dominated the perturbation in dry air at 50 °C. As the humidity rose in the environment, the perturbation was primarily from the elastic effect. This work estimated the cross-sensitivity of the interference of humidity. Finally, the neural network technique was used to identify ammonia in the environment.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2006.06.017