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Thermomechanical noise of nanooscillators with time-dependent mass

We consider the influence of adsorption–desorption (AD) kinetics on the response of micro/nanocantilever oscillators. We utilize the calculated response to analyze an oscillator with variable mass and determine the autocorrelation function and noise power spectrum for its deflection fluctuations cau...

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Bibliographic Details
Published in:Microelectronic engineering 2007-05, Vol.84 (5), p.1639-1642
Main Authors: DJURIC, Zoran G, JOKIC, Ivana M
Format: Article
Language:English
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Summary:We consider the influence of adsorption–desorption (AD) kinetics on the response of micro/nanocantilever oscillators. We utilize the calculated response to analyze an oscillator with variable mass and determine the autocorrelation function and noise power spectrum for its deflection fluctuations caused by Brownian motion (thermomechanical noise). This is done by applying the Onsager’s regression hypothesis. The presented theory can be used to study the influence of the unavoidable AD processes on measurements done using atomic force microscope or micro/nanocantilever sensors as well as the AD process kinetics itself.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2007.01.172