Wear properties of MOCVD-grown aluminium oxide films studied by cavitation erosion experiments

Thin aluminium oxide films are of interest due to many technical applications, such as hard coating, electrical insulator, or antireflective coating. It is obvious for such applications that the used films should have a good contact with the substrate underneath, be well adhering and be mechanically...

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Bibliographic Details
Published in:Surface & coatings technology 2007-09, Vol.201 (22), p.9299-9303
Main Authors: Pflitsch, Christian, Curdts, Benjamin, Buck, Volker, Atakan, Burak
Format: Article
Language:English
Subjects:
Aluminium oxide
Applied sciences
Cavitation erosion
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Contact of materials. Friction. Wear
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Hard coating
Materials science
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
MOCVD
Physics
Production techniques
Steel
Surface treatment
Wear properties
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Summary:Thin aluminium oxide films are of interest due to many technical applications, such as hard coating, electrical insulator, or antireflective coating. It is obvious for such applications that the used films should have a good contact with the substrate underneath, be well adhering and be mechanically resistant. Therefore, cavitation experiments according to the ASTM G32-92 standard were now used to study the adhesion and wear resistance of CVD-grown aluminium oxide films. It is shown that amorphous alumina films (0.75 μm thick) which are grown in a hot wall reactor on steel are enduring the cavitation erosion better than the clean and uncovered steel, and are thus very promising for technical applications. After 30 min cavitation, no damages are observed on the coated samples by SEM while uncoated steel is clearly damaged. After 180 min, the mass loss of the specimen caused by cavitation erosion is more than 7 times lower than the one of coated steel.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2007.04.092