Focused Ion Beam Micro- and Nanoengineering

This article discusses applications of focused ion beam micro- and nanofabrication. Emphasis is placed on illustrating the versatility of focused ion beam and dual-platform systems and how they complement conventional processing techniques. The article is divided into four parts: maskless milling, i...

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Bibliographic Details
Published in:MRS bulletin 2007-05, Vol.32 (5), p.417-423
Main Authors: Langford, Richard M., Nellen, Philipp M., Gierak, Jacques, Fu, Yongqi
Format: Article
Language:English
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Technical Feature
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Summary:This article discusses applications of focused ion beam micro- and nanofabrication. Emphasis is placed on illustrating the versatility of focused ion beam and dual-platform systems and how they complement conventional processing techniques. The article is divided into four parts: maskless milling, ion beam lithography, ion implantation, and techniques such as in situ micromanipulation.
ISSN:0883-7694
1938-1425
DOI:10.1557/mrs2007.65