Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays

• Published in: ACS nano 2024-07, Vol.18 (29), p.18900-18909
• Main Authors: Liu, Peng, Ding, Er-Xiong, Xu, Zhenyu, Cui, Xiaoqi, Du, Mingde, Zeng, Weijun, Karakassides, Anastasios, Zhang, Jin, Zhang, Qiang, Ahmed, Faisal, Jiang, Hua, Hakonen, Pertti, Lipsanen, Harri, Sun, Zhipei, Kauppinen, Esko I.
• Format: Article
• Language: English
• ISSN: 1936-0851; 1936-086X; 1936-086X
• DOI: 10.1021/acsnano.4c01087

With electronic devices evolving toward portable and high-performance wearables, the constraints of complex and wet processing technologies become apparent. This study presents a scalable photolithography/chemical-free method for crafting wearable all-carbon nanotube (CNT) photodetector device arrays. Laser-assisted patterning and dry deposition techniques directly assemble gas-phase CNTs into flexible devices without any lithography or lift-off processes. The resulting wafer-scale all-CNT photodetector arrays showcase excellent uniformity, wearability, environmental stability, and notable broadband photoresponse, boasting a high responsivity of 44 AW–1 and a simultaneous detectivity of 1.9 × 109 Jones. This research provides an efficient, versatile, and scalable strategy for manufacturing wearable all-CNT device arrays, allowing widespread adoption in wearable optoelectronics and multifunctional sensors.