Symmetry-preserving modeling for lithographic imaging

In computational imaging and lithography, it has been a challenge for a numerical model to faithfully preserve symmetries in the physical imaging system. In this Letter, we present a project-to-symmetry-subspace (PTSS) method to prevent symmetry loss during the iterative generation of optical kernel...

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Bibliographic Details
Published in:Optics letters 2024-07, Vol.49 (14), p.4038
Main Authors: Guo, Shaopeng, Cheng, Lei, Jiang, Hao, Ke, Xianhua, Zhang, Song, Wei, David H, Sun, Yanlong, Liu, Shiyuan
Format: Article
Language:English
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Summary:In computational imaging and lithography, it has been a challenge for a numerical model to faithfully preserve symmetries in the physical imaging system. In this Letter, we present a project-to-symmetry-subspace (PTSS) method to prevent symmetry loss during the iterative generation of optical kernels. Essentially, PTSS is to project iterative vectors onto a predefined symmetric subspace when decomposing the transmission cross coefficient (TCC). Simulation results demonstrate the PTSS-generation of a truncated set of optical kernels that are substantially free of symmetry error, regardless of the order of truncation.
ISSN:0146-9592
1539-4794
1539-4794
DOI:10.1364/OL.528120