Influence of strain, specimen orientation and background estimation on composition evaluation of InAs/GaAs by TEM

The influence of strain, specimen orientation and background estimation on the accuracy of CELFA results is investigated using displacement vectors, calculated by finite differences, in the Darwin-Howie-Whelan equations. The calculations allow a simulation of the complex amplitudes of the beams, com...

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Bibliographic Details
Published in:Philosophical magazine (Abingdon, England) England), 2007-10, Vol.87 (29), p.4461-4473
Main Authors: Rossi, EHM, Rosenauer, A, Tendeloo, G. Van
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Mechanical and acoustical properties
Physical properties of thin films, nonelectronic
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Summary:The influence of strain, specimen orientation and background estimation on the accuracy of CELFA results is investigated using displacement vectors, calculated by finite differences, in the Darwin-Howie-Whelan equations. The calculations allow a simulation of the complex amplitudes of the beams, computation of the image Fourier components and application of the CELFA method to the simulated image Fourier components. The evaluated indium concentration can also be compared with the concentration profile used as input for simulation of the displacements. An equation for the true background has been derived and it is shown that background estimation by a polynomial fitting is the major error in the application of the CELFA method. It is also shown that under proper conditions (thickness
ISSN:1478-6435
1478-6443
DOI:10.1080/14786430701551905