MICROMACHINED PIEZOELECTRIC MICROSPEAKERS FABRICATED WITH HIGH QUALITY ALN THIN FILM

This paper describes the micromachined piezoelectric microspeakers that can produce the audible signal with 20 V peak-to-peak input voltages. The diaphragm size is 4 × 4 mm 2 and the thickness of diaphragm is around 1 micron meter except partially etched piezoelectric area. The maximum sound output...

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Published in:Integrated ferroelectrics 2007-12, Vol.95 (1), p.74-82
Main Authors: SEO, KYONGWON, PARK, JONGSEON, KIM, HYONGJUNG, KIM, DONGKI, UR, SOONCHUL, YI, SEUNGHWAN
Format: Article
Language:English
Subjects:
AlN film
floating electrode
low stress nitride
piezoelectric microspeaker
Sound Pressure Level (SPL)
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cited_by cdi_FETCH-LOGICAL-c2224-ef1fed02b3d4c17e9020dca9559c46c39e91c91d2227a9f41cdee2530c601cd83
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container_title Integrated ferroelectrics
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creator SEO, KYONGWON
PARK, JONGSEON
KIM, HYONGJUNG
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YI, SEUNGHWAN
description This paper describes the micromachined piezoelectric microspeakers that can produce the audible signal with 20 V peak-to-peak input voltages. The diaphragm size is 4 × 4 mm 2 and the thickness of diaphragm is around 1 micron meter except partially etched piezoelectric area. The maximum sound output pressure of the microspeaker is even higher than ever before with a small diaphragm in high frequency range around 10 kHz. This successful result bases upon using high quality AlN thin film. The deposited AlN thin film shows c-axis oriented columnar structure and very fine grains. The highest SPL (Sound Pressure Level) measured from 300 Hz to 12 kHz shows about 100 dB around 10 kHz in case of circular type microspeaker and about 76 dB in case of cross type, respectively.
doi_str_mv 10.1080/10584580701756524
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source Taylor and Francis Science and Technology Collection
subjects AlN film
floating electrode
low stress nitride
piezoelectric microspeaker
Sound Pressure Level (SPL)
title MICROMACHINED PIEZOELECTRIC MICROSPEAKERS FABRICATED WITH HIGH QUALITY ALN THIN FILM
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