Effects of interface-engineering on the internal structure and reflective characteristics of Cr/Sc multilayer mirrors

Record reflectivity's of R =23.8% at 3.14 nm and R =30.8% at 3.12 nm have been obtained for Cr/Sc mirrors. Such increases in reflection are the result of decreases in mixing of the system layers with each other due to the use of interface-engineering methods - passivation of the already deposit...

Full description

Saved in:
Bibliographic Details
Published in:Optics express 2024-07, Vol.32 (15), p.26583
Main Authors: Smertin, R M, Barysheva, M M, Chkhalo, N I, Garakhin, S A, Malyshev, I V, Polkovnikov, V N
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Record reflectivity's of R =23.8% at 3.14 nm and R =30.8% at 3.12 nm have been obtained for Cr/Sc mirrors. Such increases in reflection are the result of decreases in mixing of the system layers with each other due to the use of interface-engineering methods - passivation of the already deposited Cr layer with nitrogen before deposition of the subsequent Sc layer. However, it has been found that adding additional B C layers to such a system leads to a decrease in reflectivity.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.524921