ZnO thin film on side polished optical fiber for gas sensing applications

In this work, thin ZnO films have been produced by pulsed laser deposition on side-polished fiber for optical gas sensor applications. The influence was investigated of the processing parameters, such as substrate temperature and oxygen pressure applied during deposition, on the sensitivity to ammon...

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Bibliographic Details
Published in:Applied surface science 2007-12, Vol.254 (4), p.1087-1090
Main Authors: Dikovska, Anna.Og, Atanasov, P.A., Andreev, A.Ts, Zafirova, B.S., Karakoleva, E.I., Stoyanchov, T.R.
Format: Article
Language:English
Subjects:
Ammonia sensor
Optical fiber sensors
Side-polished fiber
ZnO thin films
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Summary:In this work, thin ZnO films have been produced by pulsed laser deposition on side-polished fiber for optical gas sensor applications. The influence was investigated of the processing parameters, such as substrate temperature and oxygen pressure applied during deposition, on the sensitivity to ammonia of the sensing element. A shift of the spectral position of the resonance minimum to the longer wavelengths was observed at room temperature for the sample prepared at 150 °C substrate temperature and 20 Pa oxygen pressure. Spectral changes in the range 0.16–1.13 nm for NH 3 concentrations between 500 and 5000 ppm were also observed.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2007.07.155