Structural characterization of TiO2 films grown on LaAlO3 and SrTiO3 substrates using reactive molecular beam epitaxy

We have studied the microstructure of TiO2 films, grown by reactive molecular beam epitaxy (MBE) on LaAlO3 (LAO) and SrTiO3 (STO) substrates, using a combination of transmission electron microscopy (TEM) and electron energy loss spectrometry (EELS). TiO2 films grew epitaxially in the anatase polymor...

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Bibliographic Details
Published in:Journal of crystal growth 2008-02, Vol.310 (3), p.545-550
Main Authors: WENG, X, FISHER, P, SKOWRONSKI, M, SALVADOR, P. A, MAKSIMOV, O
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Molecular, atomic, ion, and chemical beam epitaxy
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Summary:We have studied the microstructure of TiO2 films, grown by reactive molecular beam epitaxy (MBE) on LaAlO3 (LAO) and SrTiO3 (STO) substrates, using a combination of transmission electron microscopy (TEM) and electron energy loss spectrometry (EELS). TiO2 films grew epitaxially in the anatase polymorph and exhibited the crystallographic orientation relation of . High-resolution TEM and EELS studies indicated the presence of a cubic TiOx phase at the TiO2/STO interface. Interfacial TiOx phases were eliminated and a sharp TiO2/STO interface was achieved by growing the TiO2 film on a heteroepitaxial STO buffer layer.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2007.10.084