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GaAs based micromachined thermal converter for gas sensors
The micromachining technology and an electro-thermo-mechanical performance analysis of GaAs based micromachined thermal converter (MTC) device to be designed for metal oxide gas sensors are presented. MTC device introduced exhibits a low power consumption due to by high thermal resistance values ( R...
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Published in: | Sensors and actuators. A. Physical. 2008-03, Vol.142 (1), p.147-152 |
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Main Authors: | , , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The micromachining technology and an electro-thermo-mechanical performance analysis of GaAs based micromachined thermal converter (MTC) device to be designed for metal oxide gas sensors are presented. MTC device introduced exhibits a low power consumption due to by high thermal resistance values (
R
th
=
15–21
K/mW), uniform temperature distribution, a fast temperature time response (
τ
∼
1.5–1.8
ms), and good mechanical integrity and thermal stability. It is also fully compatible with the GaAs HEMT based signal-processing and controlling electronics to be monolithically integrated with the gas sensors. The both a simple analytical and three-dimensional thermal modeling of the MTC device was performed. It supported the high electro-thermal conversion efficiency and fast temperature time response of the MEMS device as evaluated by the experiments. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2007.05.014 |