A Fabrication Process for Microstrip-Coupled Superconducting Transition Edge Sensors Giving Highly Reproducible Device Characteristics

Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incomi...

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Bibliographic Details
Published in:Journal of low temperature physics 2008-04, Vol.151 (1-2), p.249-254
Main Authors: Glowacka, D. M., Goldie, D. J., Withington, S., Crane, M., Tsaneva, V., Audley, M. D., Bunting, A.
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Condensed Matter Physics
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
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Summary:Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.
ISSN:0022-2291
1573-7357
DOI:10.1007/s10909-007-9635-z