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3D unsteady analysis of melt flow and segregation during EFG Si crystal growth

Ga transport in the melt during EFG Si crystal growth has been simulated within a 3D unsteady approach. The computations reveal reasons of effective redistribution of the impurity in the crystallization system. The computational results are compared with experimental data obtained in a new type of E...

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Bibliographic Details
Published in:Journal of crystal growth 2008-04, Vol.310 (7), p.2209-2214
Main Authors: Smirnova, O.V., Kalaev, V.V., Seidl, A., Birkmann, B.
Format: Article
Language:English
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Summary:Ga transport in the melt during EFG Si crystal growth has been simulated within a 3D unsteady approach. The computations reveal reasons of effective redistribution of the impurity in the crystallization system. The computational results are compared with experimental data obtained in a new type of EFG furnace, designed for the growth of dodecagonally shaped silicon tubes of about 0.5 m diameter. To study the effect of 3D unsteady melt motion, the results are compared with 2D axisymmetric computations of Ga transport.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2007.10.071