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Structure and dielectric properties of Ba(Sn0.2Ti0.8)O3 thin films grown on different substrates by a sol-gel process

Ba(Sn 0.2 Ti 0.8 )O 3 (BTS) thin films were deposited on Pt/Ti/SiO 2 /Si and LaNiO 3 /Pt/Ti/SiO 2 /Si substrates by a sol-gel processing technique, respectively. The influences of substrates on the phase and microstructure of the thin films were examined. Dielectric properties of the thin films were...

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Bibliographic Details
Published in:Journal of electroceramics 2008-12, Vol.21 (1-4), p.649-652
Main Authors: Song, S. N., Zhai, J. W., Yao, X.
Format: Article
Language:English
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Summary:Ba(Sn 0.2 Ti 0.8 )O 3 (BTS) thin films were deposited on Pt/Ti/SiO 2 /Si and LaNiO 3 /Pt/Ti/SiO 2 /Si substrates by a sol-gel processing technique, respectively. The influences of substrates on the phase and microstructure of the thin films were examined. Dielectric properties of the thin films were investigated as a function of frequency and direct current electric field. The results showed that the substrates strongly influenced the microstructure and the dielectric properties of the films. The properties of BTS thin films on LaNiO 3 /Pt/Ti/SiO 2 /Si substrates were superior to that of the films grown on Pt/Ti/SiO 2 /Si substrates.
ISSN:1385-3449
1573-8663
DOI:10.1007/s10832-007-9276-2