Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control

• Published in: Key engineering materials 2008-01, Vol.368-372, p.204-207
• Main Authors: Kim, Wan Soo, Yun, Cheol Ho, Lee, Sun Kyu, Cha, Hyun Rok, Jung, Tea Uk
• Format: Article
• Language: English
• ISSN: 1013-9826; 1662-9795; 1662-9795
• DOI: 10.4028/www.scientific.net/KEM.368-372.204

New holding mechanism is proposed to improve the positioning capability of ultrasonic linear motor based on previous researches proposed by the authors. Through the previous holding mechanism using a resonance system, the remarkable operating stability and controllability at high-power driving were achieved. However, when higher power is demanded, big noise in supporting parts of a resonance system is generated and these parts could be damaged and worn due to the discordance of a resonance frequency between a transducer and supporting horns. Also the coupling problem of two vibration modes remains because of using a half wavelength. This research proposes a new design of ultrasonic motor with three supporting points in one vibrator for high stiffness support and discusses the solution about the coupling effect and the nano-level positioning capability. Finally, a maximum driving mechanical force and the positioning accuracy were achieved over 75 N and 100 nm through this mechanism. Moreover, the efficiency of motor was 35% when the trust force was 52 N and the velocity was 0.27 m/s.