Multi-directional micro-switching valve chip with rotary mechanism

This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise a...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2008-05, Vol.143 (2), p.390-398
Main Authors: Hasegawa, Tadahiro, Nakashima, Kenichiro, Omatsu, Fumiyuki, Ikuta, Koji
Format: Article
Language:English
Subjects:
Biochemical IC family
Multi-directional micro-switching valve
Optimal design
Pneumatic micro-dispenser system
Rotary mechanism
μ-TAS
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Summary:This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2007.10.082