Study on the Polishing Mechanism of Low Temperature Co-Fired Ceramic for Microsystem Application

Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining increasing interests in the manufacturing of highly-integrated systems for microelectronic and micro-system applications. The polishing experiments of sintered LTCC using a custom-built precision polishing machine...

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Bibliographic Details
Published in:Key engineering materials 2008-01, Vol.375-376, p.47-51
Main Authors: Zhu, Ji Jun, Yuan, Ju Long, Ang, Simon S.
Format: Article
Language:English
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Summary:Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining increasing interests in the manufacturing of highly-integrated systems for microelectronic and micro-system applications. The polishing experiments of sintered LTCC using a custom-built precision polishing machine are reported in this paper. First, a micro-fluidic distributor was fabricated using LTCC. Then, the polishing of this meso-MEMS system was studied using several polishing parameters. By optimizing the polishing parameters, the surface roughness can be reduced to 4 nm.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.375-376.47