A novel contact and non-contact hybrid profilometer

A novel hybrid measuring instrument, developed for the characterization of engineering surface, is presented. This instrument is capable of contact and non-contact measurement, and both measurement systems are based on a Linnik interference microscope. So the instrument has a lower cost compared wit...

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Bibliographic Details
Published in:Precision engineering 2009-04, Vol.33 (2), p.202-208
Main Authors: Yun, Jian-Ping, Chang, Su-Ping, Xie, Tie-Bang, Zhang, Ling-Ling, Hu, Guo-Yuan
Format: Article
Language:English
Subjects:
Applied sciences
Contact/non-contact measurement
Exact sciences and technology
Interference microscope
Mechanical engineering. Machine design
Precision engineering, watch making
Surface topography
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Summary:A novel hybrid measuring instrument, developed for the characterization of engineering surface, is presented. This instrument is capable of contact and non-contact measurement, and both measurement systems are based on a Linnik interference microscope. So the instrument has a lower cost compared with other counterparts. For the contact measurement, the vertical resolution is less than 1 nm, and for the non-contact measurement, better than 0.5 nm. This paper describes the system and its performance along with results of measuring various samples.
ISSN:0141-6359
1873-2372
DOI:10.1016/j.precisioneng.2008.06.002