Fabrication and characterization of Ta2O5 photonic feedback structures

The integration of a thin layer of the high refractive index material Ta2O5 in organic laser structures is studied. A complete fabrication process of Ta2O5 based photonic crystals is described including deposition, electron beam lithography and reactive ion etching. Functional devices using methyl-s...

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Bibliographic Details
Published in:Microelectronic engineering 2008-05, Vol.85 (5-6), p.1425-1428
Main Authors: Wahlbrink, T., Bolten, J., Mollenhauer, T., Kurz, H., Baumann, K., Moll, N., Stöferle, T., Mahrt, R.F.
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electron beam lithography
Electron photonic feedback structures
Electronics
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Integrated optics. Optical fibers and wave guides
Materials
Microelectronic fabrication (materials and surfaces technology)
Nanopatterning
Optical and optoelectronic circuits
Optical materials
Optics
Organic laser
Photonic bandgap materials
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:The integration of a thin layer of the high refractive index material Ta2O5 in organic laser structures is studied. A complete fabrication process of Ta2O5 based photonic crystals is described including deposition, electron beam lithography and reactive ion etching. Functional devices using methyl-substituted ladder-type poly(para-phenylene) (MeLPPP) as gain material are characterized with regard to the effectivity of the fabricated feedback structures.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2008.01.059