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Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. They are characterized by applying a sinusoidal oscillation as mechanical input and by using a resistive load to measure the output power of the system. A maximum o...
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Published in: | Sensors and actuators. A. Physical. 2008-07, Vol.145-146, p.380-386 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. They are characterized by applying a sinusoidal oscillation as mechanical input and by using a resistive load to measure the output power of the system. A maximum output power of 40μW has been measured for a PZT based harvester excited by an input vibration having a frequency of 1.8kHz and an amplitude of 180nm. Preliminary experimental results on AlN based devices are also presented. A model capable of estimating the output power as a function of material parameters and device dimensions has been developed. Theoretical estimations have been compared with experimental results. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2007.11.005 |