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Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters

Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. They are characterized by applying a sinusoidal oscillation as mechanical input and by using a resistive load to measure the output power of the system. A maximum o...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2008-07, Vol.145-146, p.380-386
Main Authors: Renaud, M., Karakaya, K., Sterken, T., Fiorini, P., Van Hoof, C., Puers, R.
Format: Article
Language:English
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Summary:Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. They are characterized by applying a sinusoidal oscillation as mechanical input and by using a resistive load to measure the output power of the system. A maximum output power of 40μW has been measured for a PZT based harvester excited by an input vibration having a frequency of 1.8kHz and an amplitude of 180nm. Preliminary experimental results on AlN based devices are also presented. A model capable of estimating the output power as a function of material parameters and device dimensions has been developed. Theoretical estimations have been compared with experimental results.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2007.11.005