A new method of measuring electron emission induced by low energy ions from solids

A newly developed experimental system for measurements of electron emission induced by low energy ions at below low ion flux (105 ions s-1 cm-2) avoiding the fast emission degradation caused by high ion fluxes (usually applied 1010-1013 ions s-1 cm-2) has been established. The method, based on an ev...

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Bibliographic Details
Published in:Measurement science & technology 2008-05, Vol.19 (5), p.055704-055704(5)
Main Authors: Zhang, H, Breskin, A, Chechik, R, Shckemelinin, S, Ternyak, O, Cheifetz, E
Format: Article
Language:English
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Summary:A newly developed experimental system for measurements of electron emission induced by low energy ions at below low ion flux (105 ions s-1 cm-2) avoiding the fast emission degradation caused by high ion fluxes (usually applied 1010-1013 ions s-1 cm-2) has been established. The method, based on an event-by-event recording of the emitted cluster of electrons for each impinging ion event, overcomes the difficulty of measurement of reliable ion-induced secondary electron emission (IIEE) yield, associated with fast degradation of the electron yield. This method provides not only the average number (gamma) of IIEE under a given ionic impact, but actually higher moments of their distribution, which contains more information on the physical processes involved in the IIEE phenomenon. The secondary electron emission coefficients showed a dependence on the kinetic energy of incident argon ions and protons ranging from 1 keV to 10 keV on hydrogenated diamond film surfaces.
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/19/5/055704