Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones

We present a methodology to systematically extract efficient and physically-based reduced-order models based on a mixed-level simulation approach and demonstrate its practicality for the design of a capacitive MEMS microphone. The method has been implemented in a MATLAB toolbox. Starting from a FEM...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2008-07, Vol.145-146, p.263-270
Main Authors: Bedyk, W., Niessner, M., Schrag, G., Wachutka, G., Margesin, B., Faes, A.
Format: Article
Language:English
Subjects:
Capacitive microphone
Modal superposition
Reduced-order modeling
System-level modeling
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Summary:We present a methodology to systematically extract efficient and physically-based reduced-order models based on a mixed-level simulation approach and demonstrate its practicality for the design of a capacitive MEMS microphone. The method has been implemented in a MATLAB toolbox. Starting from a FEM discretization, it enables the automated generation of mixed-level VHDL-AMS based macromodels, which can be straightforwardly fed into a standard circuit simulator. The whole model generation process is described in all details. The resulting macromodels are highly efficient and moreover, in contrast to other equivalent network approaches, physically-based. Therefore they allow for the predictive simulation of microstructures with complex geometry, as it is demonstrated by the numerical analysis of a capacitive microphone.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2008.01.009