Perovskite BaHfO3 Dielectric Layers for Dynamic Random Access Memory Storage Capacitor Applications

Very thin layers of dielectric materials are of high importance for many advanced microelectronic applications. In this work, properties of very thin (

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Bibliographic Details
Published in:Advanced engineering materials 2009-04, Vol.11 (4), p.259-264
Main Authors: Lupina, Grzegorz, Dabrowski, Jarek, Dudek, Piotr, Kozlowski, Grzegorz, Lukosius, Mindaugas, Wenger, Christian, Müssig, Hans-Joachim
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Dielectric thin films
Dielectrics
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Electronics
Exact sciences and technology
Materials
Materials science
Memory applications
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Thin films
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Description
Summary:Very thin layers of dielectric materials are of high importance for many advanced microelectronic applications. In this work, properties of very thin (
ISSN:1438-1656
1527-2648
DOI:10.1002/adem.200800296