Aerosol assisted chemical vapour deposition of ZnO films on glass with noble metal and p-type dopants; use of dopants to influence preferred orientation

• Published in: Applied surface science 2009-04, Vol.255 (13), p.6555-6560
• Main Authors: Walters, G., Parkin, I.P.
• Format: Article
• Language: English
• Subjects: Aerosol assisted; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Chemical vapour deposition; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Defects and impurities in crystals; microstructure; Doping and impurity implantation in iii-v and ii-vi semiconductors; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Single-crystal and powder diffraction; Structure and morphology; thickness; Structure of solids and liquids; crystallography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Transparrent conducting oxide; X-ray diffraction and scattering; Zinc oxide
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2009.02.039

The use of aerosol assisted chemical vapour deposition (AACVD) for the formation of zinc oxide and doped ZnO films with control of preferred orientation on glass is reported. Undoped and doped ZnO host matrix films were highly transparent with visible transmission >85%. The Cu (CuO/Cu 2O) doped ZnO thin films were highly coloured and opaque. Undoped and noble metal doped ZnO films had mainly spherical morphology. Aluminium oxide/ZnO composite films had a range of morphologies from spherical to cubic. The XRD patterns for both doped and undoped ZnO films grown at substrate temperatures less than 500 °C showed strong preferred (0 0 2) crystal lattice orientation. The undoped ZnO film at 500 °C exhibited a random crystal orientation pattern for hexagonal ZnO. The introduction of small amounts of Al 2O 3 within the ZnO to form a composite significantly altered the preferred crystal orientation to (1 0 1).