Loading…
Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI
A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-or...
Saved in:
Published in: | IEEE sensors journal 2008-09, Vol.8 (9), p.1603-1611 |
---|---|
Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 -4 refractive index unit has been calculated for a 173-mum-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated. |
---|---|
ISSN: | 1530-437X 1558-1748 |
DOI: | 10.1109/JSEN.2008.929068 |