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Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI

A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-or...

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Bibliographic Details
Published in:IEEE sensors journal 2008-09, Vol.8 (9), p.1603-1611
Main Authors: Passaro, V.M.N., Loiacono, R., D'Amico, G., De Leonardis, F.
Format: Article
Language:English
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Summary:A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 -4 refractive index unit has been calculated for a 173-mum-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2008.929068