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Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI

A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-or...

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Published in:IEEE sensors journal 2008-09, Vol.8 (9), p.1603-1611
Main Authors: Passaro, V.M.N., Loiacono, R., D'Amico, G., De Leonardis, F.
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Language:English
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creator Passaro, V.M.N.
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description A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 -4 refractive index unit has been calculated for a 173-mum-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
doi_str_mv 10.1109/JSEN.2008.929068
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subjects Bragg grating
Bragg gratings
Coupled mode analysis
Coupled modes
Diffraction gratings
Gratings (spectra)
integrated optics
Mathematical analysis
Optical design
Optical refraction
Optical sensors
Optical variables control
Optical waveguide theory
Optical waveguides
Performance analysis
Sensors
Silicon on insulator technology
silicon photonics
silicon-on-insulator (SOI)
Strategy
Tolerances
title Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI
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