A Micromirror With Large Static Rotation and Vertical Actuation

A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fab...

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Published in:IEEE journal of selected topics in quantum electronics 2007-03, Vol.13 (2), p.297-303
Main Authors: Chiou, Jin-Chern, Kou, Chin-Fu, Lin, Yung-Jiun
Format: Article
Language:English
Subjects:
Actuation
Actuators
Devices
Displacement
Drives
Electrodes
Electrostatic actuators
Fabrication
Hysteresis
Microelectromechanical systems (MEMS)
Micromechanical devices
micromirror
Micromirrors
microoptoelectromechanical systems (MOEMS)
Optical attenuators
Optical switches
prestress comb drive actuator (PCA)
Principal component analysis
Quantum electronics
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cited_by cdi_FETCH-LOGICAL-c388t-8fbcfb857696cb614e0771113d4dc94160f04b36835074ab8461a665f4cb7ccc3
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container_title IEEE journal of selected topics in quantum electronics
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creator Chiou, Jin-Chern
Kou, Chin-Fu
Lin, Yung-Jiun
description A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45 mum, respectively
doi_str_mv 10.1109/JSTQE.2007.892069
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subjects Actuation
Actuators
Devices
Displacement
Drives
Electrodes
Electrostatic actuators
Fabrication
Hysteresis
Microelectromechanical systems (MEMS)
Micromechanical devices
micromirror
Micromirrors
microoptoelectromechanical systems (MOEMS)
Optical attenuators
Optical switches
prestress comb drive actuator (PCA)
Principal component analysis
Quantum electronics
title A Micromirror With Large Static Rotation and Vertical Actuation
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