A MEMS Singlet Oxygen Generator-Part II: Experimental Exploration of the Performance Space

• Published in: Journal of microelectromechanical systems 2007-12, Vol.16 (6), p.1492-1505
• Main Authors: Hill, T.F., Velasquez-Garcia, L.F., Wilhite, B.A., Rawlins, W.T., Seonkyung Lee, Davis, S.J., Jensen, K.F., Epstein, A.H., Livermore, C.
• Format: Article
• Language: English
• Subjects: Analytical chemistry; Applied fluid mechanics; Applied sciences; Chemical lasers; Chemical oxygen iodine laser (COIL); Chemical oxygen-iodine lasers; Devices; Exact sciences and technology; Exploration; Flow rate; Fluid dynamics; Fluidics; Fundamental areas of phenomenology (including applications); Inductors; infrared (IR) diagnostics; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Laser excitation; Mass spectrometry; Mass spectroscopy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectromechanical systems; microfluidics; Micromechanical devices; Micromechanical devices and systems; Optical pumping; Oxygen; Physics; Precision engineering, watch making; Pump lasers; Reactors; singlet delta oxygen; Singlet oxygen; singlet oxygen generator (SOG); Steady-state; Testing
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2007.907880

This paper reports the quantitative experimental exploration of the performance space of a microfabricated singlet oxygen generator (muSOG). SOGs are multiphase reactors that mix H 2 O 2 , KOH, and Cl 2 to produce singlet delta oxygen, or O 2 (a). A scaled-down SOG is being developed as the pump source for a microfabricated chemical oxygen-iodine laser system because scaling down a SOG yields improved performance compared to the macroscaled versions. The performance of the muSOG was characterized using O 2 (a) yield, chlorine utilization, power in the flow, molar flow rate per unit of reactor volume, and steady-state operation as metrics. The performance of the muSOG is measured through a series of optical diagnostics and mass spectrometry. The test rig, which enables the monitoring of temperatures, pressures, and the molar flow rate of O 2 (a), is described in detail. Infrared spectra and mass spectrometry confirm the steady-state operation of the device. Experimental results reveal O 2 (a) concentrations in excess of 10 17 cm -3 , O 2 (a) yield at the chip outlet approaching 80%, and molar flow rates of 02(a) per unit of reactor volume exceeding 600 times 10 -4 mol/L/s.