Large Fabrication Tolerance for VCSELs Using High-Contrast Grating

We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with plusmn20% variation in the HCG critical dimension. Emissi...

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Bibliographic Details
Published in:IEEE photonics technology letters 2008-03, Vol.20 (6), p.434-436
Main Authors: Ye Zhou, Huang, M.C.Y., Chang-Hasnain, C.J.
Format: Article
Language:English
Subjects:
Distributed Bragg reflectors
Emission
Gratings
Mirrors
optical communication
Optical device fabrication
Optical filters
optical microelectromechanical systems
Optical surface waves
Photonics
Reflectivity
Semiconductor lasers
Surface emitting lasers
Tolerances
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
vertical-cavity surface-emitting laser (VCSEL)
Wavelengths
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Summary:We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with plusmn20% variation in the HCG critical dimension. Emission wavelength of the HCG-VCSEL shifts only 2 nm with 40% change in grating spacing and 8% change in grating period.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2008.916969