Negative-Ion-Source Modeling: From Expansion to Extraction Region

In a negative-ion source, the vibrational kinetics of molecules H 2 and the negative-ion H - transport are both important in order to understand and optimize H - extraction. In this paper, two different particle models are developed, simulating the expansion and extraction regions of a radio-frequen...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2008-08, Vol.36 (4), p.1589-1599
Main Authors: Taccogna, F., Longo, S., Capitelli, M., Schneider, R.
Format: Article
Language:English
Subjects:
Coils
Computer simulation
Electrons
Excitation
Extraction
Hydrogen
Inductively coupled plasma
Ion source
Ions
Kinetics
Magnetic separation
modeling
Molecules
Monte Carlo methods
Negative ions
Plasma displays
Plasma simulation
Plasma sources
Plasma transport processes
Production
Radio frequency
Transport
Vibration
Walls
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Summary:In a negative-ion source, the vibrational kinetics of molecules H 2 and the negative-ion H - transport are both important in order to understand and optimize H - extraction. In this paper, two different particle models are developed, simulating the expansion and extraction regions of a radio-frequency inductively coupled plasma negative-ion source. These models show the importance of gas- and plasma-surface interaction in the vibrational excitation of molecules and in the direct production of negative ions from the wall.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2008.927380