Qualitative and quantitative characterization of outgassing from SU-8

SU-8 is often used as a structural material in Microsystems. In this work, the outgassing characteristics from such cross-linked SU-8 layers are studied using mass spectrometry and gas-chromatography techniques. With these methods the composition of the released matter can be identified, also the ou...

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Bibliographic Details
Published in:Microelectronic engineering 2009-04, Vol.86 (4), p.761-764
Main Authors: Melai, Joost, Salm, Cora, Wolters, Rob, Schmitz, Jurriaan
Format: Article
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Gas chromatography
Integrated circuits
Mass spectrometry
Microsystems
Outgassing
Packaging
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
SU-8
Vacuum
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Summary:SU-8 is often used as a structural material in Microsystems. In this work, the outgassing characteristics from such cross-linked SU-8 layers are studied using mass spectrometry and gas-chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of hard-bakes is studied in situ by measuring at typical hard-bake temperatures. These tests indicate that a hard-bake is needed to provide good performance in UHV environments. Using gas-chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2008.11.008