Loading…
Co-sintering of barium strontium titanate (BST) thick films inside a LTCC substrate with pressure-assisted sintering
Screen-printed ferroelectric BST thick films were co-fired inside a LTCC substrate by employing pressure-assisted sintering (PAS). Sintering pressure and time were varied and their effect on the microstructure and dielectric properties of the film was studied. Sintering conditions for the fabricatio...
Saved in:
| Published in: | Journal of the European Ceramic Society 2008-10, Vol.28 (14), p.2765-2769 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Citations: | Items that this one cites Items that cite this one |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| cited_by | cdi_FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023 |
|---|---|
| cites | cdi_FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023 |
| container_end_page | 2769 |
| container_issue | 14 |
| container_start_page | 2765 |
| container_title | Journal of the European Ceramic Society |
| container_volume | 28 |
| creator | Tick, T. Peräntie, J. Rentsch, S. Müller, J. Hein, M. Jantunen, H. |
| description | Screen-printed ferroelectric BST thick films were co-fired inside a LTCC substrate by employing pressure-assisted sintering (PAS). Sintering pressure and time were varied and their effect on the microstructure and dielectric properties of the film was studied. Sintering conditions for the fabrication of buried BST thick films were experimentally defined and parallel plate capacitors were successfully fabricated inside a LTCC substrate. The relative permittivity (
ɛ
r) of the films at 10
kHz varied from 188 to 220 depending on the sintering conditions, and the maximum tunability of the films was 44% (5.7
V/μm). The measured loss tangent (tan
δ) at zero bias was 0.005. |
| doi_str_mv | 10.1016/j.jeurceramsoc.2008.04.011 |
| format | article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_34725470</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S095522190800201X</els_id><sourcerecordid>34725470</sourcerecordid><originalsourceid>FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023</originalsourceid><addsrcrecordid>eNqNkEtv1TAQhS1EJS4t_8FCoqKLpGPn5bCjKY9KV-qCi8TOcuwJ9W0eF49T1H_fRLeqWLKaWXznnJnD2HsBqQBRXu7TPc7BYjADTTaVACqFPAUhXrGNUFWWlKL-9ZptoC6KREpRv2FvifYAooK63rDYTAn5MWLw428-dbw1wc8DpximMa5b9NGMJiL_ePVjd8Hjnbf3vPP9QNyP5B1yw7e7puE0t4tqJf_6eMcPAYnmgIkh8hTR8ZecM3bSmZ7w3fM8ZT-_ftk135Pt7beb5vM2sZkqYpK7HEULpaqdElYpW6Bry1JZ2UpZFJkUNq8slFKVsmrbVoBVrlDGLQo0ILNTdn70PYTpz4wU9eDJYt-bEaeZdJZXssgrWMBPR9CGiShgpw_BDyY8agF6LVrv9b9F67VoDbleil7EH55TDFnTd8GM1tOLg4QSqlqs11wfOVxefvAYNFmPo0XnA9qo3eT_J-4JEwSceg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>34725470</pqid></control><display><type>article</type><title>Co-sintering of barium strontium titanate (BST) thick films inside a LTCC substrate with pressure-assisted sintering</title><source>ScienceDirect Freedom Collection</source><creator>Tick, T. ; Peräntie, J. ; Rentsch, S. ; Müller, J. ; Hein, M. ; Jantunen, H.</creator><creatorcontrib>Tick, T. ; Peräntie, J. ; Rentsch, S. ; Müller, J. ; Hein, M. ; Jantunen, H.</creatorcontrib><description>Screen-printed ferroelectric BST thick films were co-fired inside a LTCC substrate by employing pressure-assisted sintering (PAS). Sintering pressure and time were varied and their effect on the microstructure and dielectric properties of the film was studied. Sintering conditions for the fabrication of buried BST thick films were experimentally defined and parallel plate capacitors were successfully fabricated inside a LTCC substrate. The relative permittivity (
ɛ
r) of the films at 10
kHz varied from 188 to 220 depending on the sintering conditions, and the maximum tunability of the films was 44% (5.7
V/μm). The measured loss tangent (tan
δ) at zero bias was 0.005.</description><identifier>ISSN: 0955-2219</identifier><identifier>EISSN: 1873-619X</identifier><identifier>DOI: 10.1016/j.jeurceramsoc.2008.04.011</identifier><language>eng</language><publisher>Oxford: Elsevier Ltd</publisher><subject>Applied sciences ; BaTiO 3 and titanates ; Building materials. Ceramics. Glasses ; Capacitors ; Capacitors. Resistors. Filters ; Ceramic industries ; Chemical industry and chemicals ; Dielectric properties ; Electrical engineering. Electrical power engineering ; Electrotechnical and electronic ceramics ; Exact sciences and technology ; LTCC ; Pressure-assisted sintering ; Technical ceramics ; Various equipment and components</subject><ispartof>Journal of the European Ceramic Society, 2008-10, Vol.28 (14), p.2765-2769</ispartof><rights>2008 Elsevier Ltd</rights><rights>2008 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023</citedby><cites>FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=20607912$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Tick, T.</creatorcontrib><creatorcontrib>Peräntie, J.</creatorcontrib><creatorcontrib>Rentsch, S.</creatorcontrib><creatorcontrib>Müller, J.</creatorcontrib><creatorcontrib>Hein, M.</creatorcontrib><creatorcontrib>Jantunen, H.</creatorcontrib><title>Co-sintering of barium strontium titanate (BST) thick films inside a LTCC substrate with pressure-assisted sintering</title><title>Journal of the European Ceramic Society</title><description>Screen-printed ferroelectric BST thick films were co-fired inside a LTCC substrate by employing pressure-assisted sintering (PAS). Sintering pressure and time were varied and their effect on the microstructure and dielectric properties of the film was studied. Sintering conditions for the fabrication of buried BST thick films were experimentally defined and parallel plate capacitors were successfully fabricated inside a LTCC substrate. The relative permittivity (
ɛ
r) of the films at 10
kHz varied from 188 to 220 depending on the sintering conditions, and the maximum tunability of the films was 44% (5.7
V/μm). The measured loss tangent (tan
δ) at zero bias was 0.005.</description><subject>Applied sciences</subject><subject>BaTiO 3 and titanates</subject><subject>Building materials. Ceramics. Glasses</subject><subject>Capacitors</subject><subject>Capacitors. Resistors. Filters</subject><subject>Ceramic industries</subject><subject>Chemical industry and chemicals</subject><subject>Dielectric properties</subject><subject>Electrical engineering. Electrical power engineering</subject><subject>Electrotechnical and electronic ceramics</subject><subject>Exact sciences and technology</subject><subject>LTCC</subject><subject>Pressure-assisted sintering</subject><subject>Technical ceramics</subject><subject>Various equipment and components</subject><issn>0955-2219</issn><issn>1873-619X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNqNkEtv1TAQhS1EJS4t_8FCoqKLpGPn5bCjKY9KV-qCi8TOcuwJ9W0eF49T1H_fRLeqWLKaWXznnJnD2HsBqQBRXu7TPc7BYjADTTaVACqFPAUhXrGNUFWWlKL-9ZptoC6KREpRv2FvifYAooK63rDYTAn5MWLw428-dbw1wc8DpximMa5b9NGMJiL_ePVjd8Hjnbf3vPP9QNyP5B1yw7e7puE0t4tqJf_6eMcPAYnmgIkh8hTR8ZecM3bSmZ7w3fM8ZT-_ftk135Pt7beb5vM2sZkqYpK7HEULpaqdElYpW6Bry1JZ2UpZFJkUNq8slFKVsmrbVoBVrlDGLQo0ILNTdn70PYTpz4wU9eDJYt-bEaeZdJZXssgrWMBPR9CGiShgpw_BDyY8agF6LVrv9b9F67VoDbleil7EH55TDFnTd8GM1tOLg4QSqlqs11wfOVxefvAYNFmPo0XnA9qo3eT_J-4JEwSceg</recordid><startdate>20081001</startdate><enddate>20081001</enddate><creator>Tick, T.</creator><creator>Peräntie, J.</creator><creator>Rentsch, S.</creator><creator>Müller, J.</creator><creator>Hein, M.</creator><creator>Jantunen, H.</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20081001</creationdate><title>Co-sintering of barium strontium titanate (BST) thick films inside a LTCC substrate with pressure-assisted sintering</title><author>Tick, T. ; Peräntie, J. ; Rentsch, S. ; Müller, J. ; Hein, M. ; Jantunen, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Applied sciences</topic><topic>BaTiO 3 and titanates</topic><topic>Building materials. Ceramics. Glasses</topic><topic>Capacitors</topic><topic>Capacitors. Resistors. Filters</topic><topic>Ceramic industries</topic><topic>Chemical industry and chemicals</topic><topic>Dielectric properties</topic><topic>Electrical engineering. Electrical power engineering</topic><topic>Electrotechnical and electronic ceramics</topic><topic>Exact sciences and technology</topic><topic>LTCC</topic><topic>Pressure-assisted sintering</topic><topic>Technical ceramics</topic><topic>Various equipment and components</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Tick, T.</creatorcontrib><creatorcontrib>Peräntie, J.</creatorcontrib><creatorcontrib>Rentsch, S.</creatorcontrib><creatorcontrib>Müller, J.</creatorcontrib><creatorcontrib>Hein, M.</creatorcontrib><creatorcontrib>Jantunen, H.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Journal of the European Ceramic Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tick, T.</au><au>Peräntie, J.</au><au>Rentsch, S.</au><au>Müller, J.</au><au>Hein, M.</au><au>Jantunen, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Co-sintering of barium strontium titanate (BST) thick films inside a LTCC substrate with pressure-assisted sintering</atitle><jtitle>Journal of the European Ceramic Society</jtitle><date>2008-10-01</date><risdate>2008</risdate><volume>28</volume><issue>14</issue><spage>2765</spage><epage>2769</epage><pages>2765-2769</pages><issn>0955-2219</issn><eissn>1873-619X</eissn><abstract>Screen-printed ferroelectric BST thick films were co-fired inside a LTCC substrate by employing pressure-assisted sintering (PAS). Sintering pressure and time were varied and their effect on the microstructure and dielectric properties of the film was studied. Sintering conditions for the fabrication of buried BST thick films were experimentally defined and parallel plate capacitors were successfully fabricated inside a LTCC substrate. The relative permittivity (
ɛ
r) of the films at 10
kHz varied from 188 to 220 depending on the sintering conditions, and the maximum tunability of the films was 44% (5.7
V/μm). The measured loss tangent (tan
δ) at zero bias was 0.005.</abstract><cop>Oxford</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.jeurceramsoc.2008.04.011</doi><tpages>5</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0955-2219 |
| ispartof | Journal of the European Ceramic Society, 2008-10, Vol.28 (14), p.2765-2769 |
| issn | 0955-2219 1873-619X |
| language | eng |
| recordid | cdi_proquest_miscellaneous_34725470 |
| source | ScienceDirect Freedom Collection |
| subjects | Applied sciences BaTiO 3 and titanates Building materials. Ceramics. Glasses Capacitors Capacitors. Resistors. Filters Ceramic industries Chemical industry and chemicals Dielectric properties Electrical engineering. Electrical power engineering Electrotechnical and electronic ceramics Exact sciences and technology LTCC Pressure-assisted sintering Technical ceramics Various equipment and components |
| title | Co-sintering of barium strontium titanate (BST) thick films inside a LTCC substrate with pressure-assisted sintering |
| url | http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-23T07%3A49%3A22IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Co-sintering%20of%20barium%20strontium%20titanate%20(BST)%20thick%20films%20inside%20a%20LTCC%20substrate%20with%20pressure-assisted%20sintering&rft.jtitle=Journal%20of%20the%20European%20Ceramic%20Society&rft.au=Tick,%20T.&rft.date=2008-10-01&rft.volume=28&rft.issue=14&rft.spage=2765&rft.epage=2769&rft.pages=2765-2769&rft.issn=0955-2219&rft.eissn=1873-619X&rft_id=info:doi/10.1016/j.jeurceramsoc.2008.04.011&rft_dat=%3Cproquest_cross%3E34725470%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c385t-4d4e1b0689d81c88c5edb668c2b2255321c47c0628627bbb10c8d58ad689ea023%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=34725470&rft_id=info:pmid/&rfr_iscdi=true |