First application of Cc-corrected imaging for high-resolution and energy-filtered TEM

Contrast-transfer calculations indicate that Cc correction should be highly beneficial for high-resolution and energy-filtered transmission electron microscopy. A prototype of an electron optical system capable of correcting spherical and chromatic aberration has been used to verify these calculatio...

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Bibliographic Details
Published in:Journal of electron microscopy 2009-06, Vol.58 (3), p.147-155
Main Authors: Kabius, Bernd, Hartel, Peter, Haider, Maximilian, Müller, Heiko, Uhlemann, Stephan, Loebau, Ulrich, Zach, Joachim, Rose, Harald
Format: Article
Language:English
Subjects:
aberration correction
chromatic aberration
EFTEM
HRTEM
oxides
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Summary:Contrast-transfer calculations indicate that Cc correction should be highly beneficial for high-resolution and energy-filtered transmission electron microscopy. A prototype of an electron optical system capable of correcting spherical and chromatic aberration has been used to verify these calculations. A strong improvement in resolution at an acceleration voltage of 80 kV has been measured. Our first Cc-corrected energy-filtered experiments examining a (LaAlO3)0.3(Sr2AlTaO6)0.7/LaCoO3 interface demonstrated a significant gain for the spatial resolution in elemental maps of La.
ISSN:0022-0744
1477-9986
DOI:10.1093/jmicro/dfp021