Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography

• Published in: Microelectronic engineering 2009-12, Vol.86 (12), p.2375-2380
• Main Authors: Zhou, Weimin, Niu, Xiaoming, Min, Guoquan, Song, Zhitang, Zhang, Jing, Liu, Yanbo, Li, Xiaoli, Zhang, Jianping, Feng, Songling
• Format: Article
• Language: English
• Subjects: AAO membrane; Aluminum oxide; Applied sciences; Arrays; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Electronics; Exact sciences and technology; Gallium nitrides; GaN photonic crystal; Lithography; Materials; Materials science; Methods of nanofabrication; Microelectronic fabrication (materials and surfaces technology); Molds; Nanocomposites; Nanomaterials; Nanoscale pattern formation; Nanostructure; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Structure of solids and liquids; crystallography; Structure of specific crystalline solids; UV-nanoimprint lithography
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2009.04.024

High-density ordered arrays of h-PDMS nanopillars were fabricated using an anodic aluminium oxide (AAO) template. The pore diameter and the interpore distance of the replica h-PDMS molding are well consistent with that of AAO template. The inverse h-PDMS has the surface characteristic of hydrophobic and surface energy of 130°. Hexagonally arranged array can be obtained by UV-nanoimprint lithography using our proposed h-PDMS mold, and their morphologies can be transferred truly. Besides, the h-PDMS mold has been used to fabricate photonic crystal structure on GaN by nanoimprint process, which could be found an application in the light output of GaN LED.