Development of a flexure hinge-based stack-type five-degrees-of-freedom nanometre-scale stage for a heavy-loading machining process

Abstract The current paper concentrates on the design and manufacturing process of a stack-type nanometre positioning stage with high accuracy and multiple degrees of freedom for a heavy-loading machine. The stack-type stage described in this paper comprises a flexible structure as the primary compo...

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Bibliographic Details
Published in:Proceedings of the Institution of Mechanical Engineers. Part B, Journal of engineering manufacture Journal of engineering manufacture, 2007-03, Vol.221 (3), p.379-385
Main Authors: Jywe, Wenyuh, Liu, Chien-Hung, Teng, Yun-Feng
Format: Article
Language:English
Subjects:
Accuracy
Actuators
Applied sciences
Coupling
Degrees of freedom
Design
Displacement
Efficiency
Exact sciences and technology
Flexing
Heat generation
High resolution
Lasers
Load
Loading machines
Machine tools
Machinery
Machining
Mathematical analysis
Mechanical engineering
Mechanical engineering. Machine design
Movement
Nanostructure
Piezoelectric actuators
Piezoelectricity
Precision engineering, watch making
Sensors
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Summary:Abstract The current paper concentrates on the design and manufacturing process of a stack-type nanometre positioning stage with high accuracy and multiple degrees of freedom for a heavy-loading machine. The stack-type stage described in this paper comprises a flexible structure as the primary component and can be easily adjusted from single-axis movement to a five-degrees-of-freedom motion to cope with different needs. Piezoelectric actuators are known for their unique features, such as quick response, high resolution, electrical mechanical coupling efficiency, and low heat generation. Therefore, six piezoelectric actuators are provided to trigger the five-degrees-of-freedom motion for the positioning stage. The stage sensor is provided with five capacitive sensors inside the five-degrees-of-freedom stage to measure the stage displacement. As indicated by the experimental results, the linear displacement reaches 52. 76 μm along the x axis, 51. 79 μm along the y axis, and 12. 08 μm along the z axis. The rotation displacement around the x axis is θ x = 184 μrad and the rotation displacement around the y axis is θ y = 277 μrad. The heavy-loading test indicates that the stage is capable of taking a load of 12 kgs.
ISSN:0954-4054
2041-2975
DOI:10.1243/09544054JEM487