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Dynamics of the Surface Composition and Structure of InP Oxidized in the Presence of V and V205

According to the Auger- and IR-spectroscopy data, the layers obtained as a result of the oxidation are mainly indium phosphates and vanadates with nonuniform distributions of elements over the oxide-film thickness. Results describing the kinetics of heterostructure oxidation are obtained. The solid-...

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Bibliographic Details
Published in:Inorganic materials 2008-11, Vol.44 (11), p.1163-1168
Main Authors: Lapenko, A A, Lisitsyn, S V, Tomina, E V, Valyukhov, D P, Mittova, I Ya
Format: Article
Language:English
Online Access:Get full text
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Summary:According to the Auger- and IR-spectroscopy data, the layers obtained as a result of the oxidation are mainly indium phosphates and vanadates with nonuniform distributions of elements over the oxide-film thickness. Results describing the kinetics of heterostructure oxidation are obtained. The solid-phase diffusion of the substrate components is shown to be the governing process. This implies that the considered process is catalytic. The reaction rate is weakly dependent on the catalyst amount.
ISSN:0020-1685
DOI:10.1134/S0020168508110022