Synthesis and characterization of Cr–B–N coatings deposited by reactive arc evaporation

Nanocomposite Cr–B–N coatings were deposited from CrB0.2 compound targets by reactive arc evaporation using an Ar/N2 discharge at 500 °C and −20 V substrate bias. Elastic recoil detection (ERDA), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), high-resolution transmission electron m...

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Bibliographic Details
Published in:Journal of materials research 2008-11, Vol.23 (11), p.3048-3055
Main Authors: Polychronopoulou, K., Neidhardt, J., Rebholz, C., Baker, M.A., O’Sullivan, M., Reiter, A.E., Gunnaes, A.E., Giannakopoulos, K., Mitterer, C.
Format: Article
Language:English
Subjects:
Applied and Technical Physics
Biomaterials
Coating
Inorganic Chemistry
Materials Engineering
Materials Science
Nanostructure
Nanotechnology
Physical vapor deposition (PVD)
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Summary:Nanocomposite Cr–B–N coatings were deposited from CrB0.2 compound targets by reactive arc evaporation using an Ar/N2 discharge at 500 °C and −20 V substrate bias. Elastic recoil detection (ERDA), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), and selected-area electron diffraction (SAED) were used to study the effect of the N2 partial pressure on composition and microstructure of the coatings. Cross-sectional scanning electron microscopy (SEM) showed that the coating morphology changes from a glassy to a columnar structure with increasing N2 partial pressure, which coincides with the transition from an amorphous to a crystalline growth mode. The saturation of N content in the coating confirms the formation of a thermodynamically stable CrN–BN dual-phase structure at higher N2 fractions, exhibiting a maximum in hardness of approximately 29 GPa.
ISSN:0884-2914
2044-5326
DOI:10.1557/JMR.2008.0370