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Optical emission spectroscopy of DC pulsed plasmas used for steel nitriding

Optical emission spectroscopy of atomic lines and molecular vibrational bands in N 2, H 2/N 2 and Ar/N 2 plasmas at steel nitriding conditions have been reported as an application of this diagnostic to plasma nitriding. An increase in Ar I intensity as Ar percentage increases in an Ar/N 2 mixture is...

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Bibliographic Details
Published in:Surface & coatings technology 2008-11, Vol.203 (3), p.229-233
Main Authors: Sharma, M.K., Saikia, B.K., Bujarbarua, S.
Format: Article
Language:English
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Summary:Optical emission spectroscopy of atomic lines and molecular vibrational bands in N 2, H 2/N 2 and Ar/N 2 plasmas at steel nitriding conditions have been reported as an application of this diagnostic to plasma nitriding. An increase in Ar I intensity as Ar percentage increases in an Ar/N 2 mixture is observed, while the effect on N 2 + emission has a decrease, just the reverse of Ar I emission profile. As electron energy distribution function, EEDF, shifted to high electron energy as Ar percentage increases in the mixture, the presence of high-energy electron at high gas temperature of discharge can be predicted. It has also been found that pressure effect on N 2 + band in pure nitrogen plasma is to increase the band intensities. Spatial distribution of N 2 +(0,1) and N 2 +(0,2) emission profile in N 2/H 2 mixture reveals shrinking of negative glow by 10 mm in the presence of 10% H 2 and 90% N 2 relative to a pure N 2 plasma.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2008.08.036