Loading…
Optical emission spectroscopy of DC pulsed plasmas used for steel nitriding
Optical emission spectroscopy of atomic lines and molecular vibrational bands in N 2, H 2/N 2 and Ar/N 2 plasmas at steel nitriding conditions have been reported as an application of this diagnostic to plasma nitriding. An increase in Ar I intensity as Ar percentage increases in an Ar/N 2 mixture is...
Saved in:
Published in: | Surface & coatings technology 2008-11, Vol.203 (3), p.229-233 |
---|---|
Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | Optical emission spectroscopy of atomic lines and molecular vibrational bands in N
2, H
2/N
2 and Ar/N
2 plasmas at steel nitriding conditions have been reported as an application of this diagnostic to plasma nitriding. An increase in Ar I intensity as Ar percentage increases in an Ar/N
2 mixture is observed, while the effect on N
2
+ emission has a decrease, just the reverse of Ar I emission profile. As electron energy distribution function, EEDF, shifted to high electron energy as Ar percentage increases in the mixture, the presence of high-energy electron at high gas temperature of discharge can be predicted. It has also been found that pressure effect on N
2
+ band in pure nitrogen plasma is to increase the band intensities. Spatial distribution of N
2
+(0,1) and N
2
+(0,2) emission profile in N
2/H
2 mixture reveals shrinking of negative glow by 10 mm in the presence of 10% H
2 and 90% N
2
relative to a pure N
2 plasma. |
---|---|
ISSN: | 0257-8972 1879-3347 |
DOI: | 10.1016/j.surfcoat.2008.08.036 |