Non-contact atomic force microscopy characterization of micro-cantilevers and piezo electric transducers with frequencies up to the tens of MHz

We investigated the use of the non-contact atomic force microscopy (NCAFM) technique for evaluating high frequency mechanical vibrations. We demonstrated a clear resonance frequency ( f res) of ∼11.8 MHz measured from a 0.25 cm 2 piece Si placed on top of a driven PZT and probed by an AFM cantilever...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2008-11, Vol.148 (1), p.306-310
Main Authors: Parker, T.C., Tang, F., Wang, G.-C., Lu, T.-M.
Format: Article
Language:English
Subjects:
Non-contact atomic force microscopy
Resonance measurement
Very high frequency
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Summary:We investigated the use of the non-contact atomic force microscopy (NCAFM) technique for evaluating high frequency mechanical vibrations. We demonstrated a clear resonance frequency ( f res) of ∼11.8 MHz measured from a 0.25 cm 2 piece Si placed on top of a driven PZT and probed by an AFM cantilever. We also showed that the probe cantilever in the NCAFM was able to follow the envelope of a Si on PZT vibration driven at 41 MHz frequency with a cyclic voltage. We showed that our method will not introduce a shift in the measured f res through comparison with the optically measured f res from a series of sample cantilevers using both mechanical excitation and the thermal noise-mechanical frequency spectra. These sample cantilevers were then measured under various conditions using the NCAFM resonance technique and the results showed a shift of
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2008.07.011