Approximation of elastic deformations on the surface of a silicon piezoresistive pressure transducer with three-dimensional E-type micromechanical structure

Approximation expressions for use in calculating tangential deformations on the surface of an E-type silicon piezoresistive membrane pressure transducer with three-dimensional micromechanical structure under actual operating conditions of a permanent joint and restraint by means of a supporting elem...

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Bibliographic Details
Published in:Measurement techniques 2009-03, Vol.52 (3), p.277-281
Main Authors: Sokolov, L. V., Agafonova, N. A., Naumov, Yu. V.
Format: Article
Language:English
Subjects:
Analytical Chemistry
Approximation
Characterization and Evaluation of Materials
Dependence
Electronics
Mathematical models
Measurement Science and Instrumentation
Measurement techniques
Physical Chemistry
Physics
Physics and Astronomy
Polynomials
Pressure transducers
Silicon
Studies
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Summary:Approximation expressions for use in calculating tangential deformations on the surface of an E-type silicon piezoresistive membrane pressure transducer with three-dimensional micromechanical structure under actual operating conditions of a permanent joint and restraint by means of a supporting element are obtained.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-009-9252-0